Browsing School of Engineering, Computer & Mathematical Sciences by Author "Dell, JM"

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Characterization of low-temperature bulk micromachining of silicon using an SF6/O2 inductively coupled plasma

Jiang, F; Keating, A; Martyniuk, M; Prasad, K; Faraone, L; Dell, JM (IOP Publishing, 2012)

The principal aim of this work was to characterize deep silicon etching at sample temperatures well-below room temperature, using SF6/O2 inductively coupled plasma (ICP) for micro-electro-mechanical systems (MEMS) applications. ...